MEMS Design

Our microelectromechanical systems (MEMS) knowledge includes, design, modeling, fabrication and testing.

We have worked with commercial and custom fabricated MEMS devices. We design the MEMS device and its support electronics if desired. We are experienced with many types of MEMS devices including, accelerometers, gyroscopes, microphones, resonators, optical sensors, mirror arrays and fluidic systems. We have helped to develop MEMS fabrication processes for use in custom sensor systems. We interface with the MEMS foundries to successfully turn the design into a working device.

MEMS Design Principles

Interface with customer to fully understand the design goals
Prepare preliminary implementation concept writeup
Review concept with customer and refine to arrive at final device implementation
Implement mechanical model and simulate performance
Review performance simulation results with customer
Translate mechanical model into layout
Fabricate and package device
Test and characterize device
Deliver final devices and support documentation
Provide customer support throughout the life cycle of the device